LT STM

   Low Temperature Operation at T < 5 K

   Lowest Thermal Drift & Highest Stablility

   Variable Temperature Operation

   Guided 3D Coarse Positioning

   50 Hours LHe Hold Time & Fast Cool Down

   Safe & Quick Sample / Tip Exchange

   Optimal dI/dV Spectroscopy


XA VT STM

   Temperature Operation at 50 K - 500 K

   True pA STM and Spectroscopy

  Guided 3D Coarse Positioning   

   Variable Temperature Operation

   In - situ Evaporation capability

   Optimal dI/dV Spectroscopy

 


Old VT STM

   Temperature Operation at 120 K - 500 K

   True pA STM and Spectroscopy

  Guided 3D Coarse Positioning   

   Variable Temperature Operation

   In - situ Evaporation capability

   Optimal dI/dV Spectroscopy

   E-beam beating for sample preparation

ARPES(R3000)

   < 3meV at 2eV pass energy 20eV Kinetic energy    Energy Resolution is  < 3mV

   +/- 15 degree Transmission Mode Lens Acceptance

  < 0.1 degree from 0.1 mm Spot Angular Resolution

   Variable Temperature Operation

   ±10°, ±7,5°,±5°,±3° Angle modes

   Kinetic energy range: 0.5 eV – 1500 eV

   Bakeable to 150°C

LEED

   Understading Structure of Singe Crystal Surface

   Long-Range Order of Periodic Surface Structure

   High Performance Optics  

   Light Shielded Miniature Electron Gun

   50 or100 mm z-Retraction

   Integral Multi-Segment Shutter

  

Standard CVD

   Temperature Operation at R.T. - 1300°C

   2D Materials Synthesis

   

   

   

   

   


Thermal CVD

   Temperature Operation at R.T. - 1300°C

   Two Furnaces System

   2D Materials Synthesis

   

   

   

   


Cold-Wall CVD

   Temperature Operation at R.T. - 1300°C

   2D Materials Synthesis

   High Vacuum System

   Graphite Heating Zone

   

   

   

AFM

   Nanoscale Topography Acquisition

   Nanoscale Resolution

   Dynamic Force Microscope

   Surface Roughness Analysis

   Height Line Profile

   

   

SEM

   Nanoscale Resolution

   3D Shape Surface Imaging

   

   

   

   

   

Raman spectroscopy

   532nm Wavelength Light Source

   Real-time Spectrum Acquisition

   Single Spectrum Acquisition

   Large Area Scan

   

   

   

Mask Aligner

   200nm ~ 300nm Wavelength Light Source

   Micro/Nanosize Patterning

   Devices Fabrication